Optomechanical force sensors, cantilevers, and systems thereof
US10031158B1 · kind B1 · utility
22Cited by
17References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2016 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Jan 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12138
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.