Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film
US10031415B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2017 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Aug 21, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0159
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A three-dimensional (“3D”) structure for handling fluids, a fluid handling device containing the 3D structure, and a method of making the 3D structure. The method includes providing a composite photoresist material that includes: (a) a first photoresist layer derived from a photoresist resin having a first chemical property selected from the group consisting of epoxide equivalent weight, aromatic content, and crosslink density and (b) at least a second photoresist layer derived from a photoresist resin having a second chemical property selected from the group consisting of epoxide equivalent weight, aromatic content, and crosslink density different from the first chemical property. The composite photoresist material is devoid of an adhesion promotion layer between layers of the composite photoresist material and the composite photoresist material has varying mechanical and/or physical properties through a thickness of the 3D structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.