Patent · US Active

Microelectromechanical gyroscopes and related apparatus and methods

US10032976B2 · kind B2 · utility

1Cited by

70References

21Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Guiti Zolfagharkhani · Watertown, US
Jan H. Kuypers · Cambridge, US
Alexei Gaidarzhy · Watertown, US
Andrew Sparks · Honolulu, US

Key dates

Filing date	Sep 15, 2014
Grant date	Jul 24, 2018
Priority date	—
Expiry date	Apr 9, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/88
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.