Reducing hysteresis effects in an accelerometer
US10036765B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2015 |
| Grant date | Jul 31, 2018 |
| Priority date | — |
| Expiry date | May 9, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In some examples, the disclosure describes an accelerometer having improved hysteresis effects, the accelerometer including a proof mass assembly including a proof mass, a support structure, and a flexure flexibly connecting the proof mass to the support structure to allow the proof mass to move about the plane defined by the support structure. Some examples may include at least one thin film lead including an electrically conductive material on the flexure, where the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and where the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.