Method for accurate and low-consumption MEMS micropump actuation and device for carrying out said method
US10041483B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 27, 2012 |
| Grant date | Aug 7, 2018 |
| Priority date | — |
| Expiry date | Apr 23, 2034 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/043
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention describes the improvements due to alternated actuation cycles to reduce the delivery errors related to the pumping chamber elasticity, the actuator relaxation or hysteresis. The method actuates a pumping device with an optimal driving voltage profile, wherein the pumping device comprises a pumping chamber including a pumping membrane and a voltage controlled actuator connected to said membrane; the movement of said membrane being defined by three positions, namely a rest, a bottom and a top position. The method includes the actuation of the membrane with a pumping pattern including at least two different cycles: Cycle A: rest-bottom-rest-top-rest Cycle B: rest-top-rest-bottom-rest. The invention also relates to a device to carry out the method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.