Radiation imaging sensor

US10041837B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Ulrich Hofmann · Itzehoe, DE
• Manfred Weiss · Bad Liebenzell, DE
• Joachim Janes · Itzehoe, DE
• Frank Senger · Kaufbeuren, DE

Key dates

• Filing date: Nov 19, 2014
• Grant date: Aug 7, 2018
• Expiry date: Feb 5, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2005/0077
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.