Patent · US Active

Probe head of vertical probe card

US10041974B2 · kind B2 · utility

3Cited by
7References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 9, 2016
Grant dateAug 7, 2018
Priority date
Expiry dateSep 9, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/06722
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A probe head includes a probe base, a film, and a probe assembly. The probe base includes first, second, and third guiding boards. The second guiding board is fixed between the first and third guiding boards. The film is fixed to the probe base and has a hole. The probe assembly passes through the first, second, and third guiding boards and the hole, and includes a probe and an outer spring sleeve. The probe has a tip passing out through the third guiding board. The outer spring sleeve is sleeved at the exterior of the probe and has a spring area and a plurality of non-spring areas. The spring area is disposed between adjacent two of the non-spring areas. One of the non-spring areas has a bonding section mounted to the probe and retained between the third guiding board and the film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.