Patent · US Active

End block assembly, bearing assembly, and method for manufacturing a bearing assembly

US10043643B2 · kind B2 · utility

0Cited by

0References

15Claims

0Family size

Assignee

VON ARDENNE Asset GmbH & Co KG · DE

Inventors

Sebastian Siegert · Dresden, DE
Gerit Stude · Dresden, DE
Gerd Arnold · Leipzig, DE

Key dates

Filing date	May 10, 2016
Grant date	Aug 7, 2018
Priority date	—
Expiry date	Jun 25, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3444
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In various embodiments, an end block assembly for rotatably mounting a tubular electrode in a processing chamber is provided. The end block assembly includes a receptacle region for receiving a bearing assembly which has a coupling region for coupling the tubular electrode thereto, the bearing assembly of which the coupling region is supported by a sleeve of the bearing assembly. The sleeve is plug-fitted into the receptacle region. The sleeve is joined together from a plurality of segments, the external faces thereof forming a lateral surface of the bearing assembly and at least two segments thereof being formed from dissimilar materials. The external faces of the two segments are mutually aligned such that they are flush with one another.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.