High capacity overhead transport (OHT) rail system with multiple levels
US10043699B2 · kind B2 · utility
4Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2015 |
| Grant date | Aug 7, 2018 |
| Priority date | — |
| Expiry date | Jan 11, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2201/0297
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An overhead transport (OHT) system with multiple levels of rails for the transport of semiconductor workpieces is provided. A first vehicle is configured to travel on, and move a semiconductor workpiece along, a first rail. A second vehicle is configured to travel on, and move the semiconductor workpiece along, a second rail overlying the first rail. A controller is configured to control the first and second vehicles to transfer the semiconductor workpiece along the first and second rails, between process or inspection tools. A method for transferring semiconductor workpieces across multiple levels of rails is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.