Patent · US Active

Thin-film transistor having channel structure with increased width-length ratio

US10043916B2 · kind B2 · utility

2Cited by
3References
7Claims
0Family size

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Key dates

Filing dateJul 28, 2015
Grant dateAug 7, 2018
Priority date
Expiry dateJul 28, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6736
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments of the invention disclose a thin-film transistor having a channel structure that has an increased width-length ratio and a manufacturing method thereof, a display substrate and a display device. The thin-film transistor comprises a gate, a gate insulation layer and an active layer stacked on a substrate, the active layer is formed therein with a source region, a drain region and a channel region, a surface of the active layer facing the gate insulation layer is at least partially formed with a non-planar surface in the channel region, such that the non-planar surface of the active layer has a tortuous shape in a width direction of the channel region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.