Motion sensor integrated nano-probe N/MEMS apparatus, method, and applications
US10048289B2 · kind B2 · utility
12Cited by
5References
21Claims
0Family size
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Key dates
| Filing date | Dec 17, 2012 |
| Grant date | Aug 14, 2018 |
| Priority date | — |
| Expiry date | Jan 25, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.