Micromirror

US10048487B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Heiko Nitsche · Reutlingen, DE
• Frederic Njikam Njimonzie · Reutlingen, DE
• Wolfram Schock · Reutlingen, DE
• Joerg Muchow · Reutlingen, DE
• Helmut Grutzeck · Tübingen, DE
• Zoltan Lestyan · Martonvásár, HU

Key dates

• Filing date: Oct 23, 2012
• Grant date: Aug 14, 2018
• Expiry date: Dec 9, 2032

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0163
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.