MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
US10048491B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2016 |
| Grant date | Aug 14, 2018 |
| Priority date | — |
| Expiry date | Sep 15, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F3/0423
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.