MEMS structure with graphene component
US10053358B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Aug 31, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0136
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A microelectromechanical systems (MEMS) structure includes a substrate, an epitaxial polysilicon cap located above the substrate, a first cavity portion defined between the substrate and the epitaxial polysilicon cap, and a first graphene component having at least one graphene surface immediately adjacent to the first cavity portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.