Process for preparing an epitaxial alpha-quartz layer on a solid support, material obtained and uses thereof
US10053795B2 · kind B2 · utility
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2References
17Claims
0Family size
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Key dates
| Filing date | Jul 22, 2013 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Jul 2, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249969
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a process for preparing epitaxial α-quartz layers on a solid substrate, to the material obtained according to this process, and to the various uses thereof, especially in the electronics field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.