Shape measurement apparatus and shape measurement method
US10054431B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2017 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Mar 24, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape measurement apparatus includes: a holder for holding a measuring object having a spherical measurement surface; a sensor configured to emit light onto the measurement surface to perform non-contact measurement of a distance between the sensor and the measurement surface and output a measured value; a rotation mechanism for rotating the sensor around a first axis; a sensor movement mechanism for moving the sensor along a second axis orthogonal to the first axis so as to be movable across an intersection of the second axis with the first axis; a holder movement mechanism for moving the holder along a vertical direction and on a plane orthogonal to vertical direction; and a control device configured to: calculate the shape of the measurement surface based on the measured value; calculate a spherical center of the measurement surface; and cause the holder movement mechanism to match the spherical center with the intersection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.