Patent · US Active

Measuring arrangement for reflection measurement

US10054484B2 · kind B2 · utility

0Cited by

3References

11Claims

0Family size

Assignee

Carl Zeiss Spectroscopy GmbH · DE

Inventors

Jörg Margraf · Königsee, DE
Jens Mondry · Jena, DE

Key dates

Filing date	Jun 22, 2015
Grant date	Aug 21, 2018
Priority date	—
Expiry date	Jun 22, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/065
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a measuring arrangement for detecting an absolute reflection spectrum of a sample in a process for producing the sample. It comprises a light source for generating measurement light, a homogenizer for generating a uniform spatial illuminance distribution of the measurement light; a movable reflector and a receiver for collecting the measurement light reflected from the sample and/or the reflector. According to the invention, the reflector both for a reference measurement and for a sample measurement is positioned in an observation beam path and arranged on the same side of the sample as the light source in order to feed the reflected measurement light to the receiver.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.