Real-time variable parameter micro-nano optical field modulation system and interference lithography system
US10054859B2 · kind B2 · utility
11Cited by
3References
10Claims
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Key dates
| Filing date | Jan 6, 2016 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Jan 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0988
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.