Micro-mechanical component

US10059583B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Achim Breitling · Echterdingen, DE
• Christof Schwenk · Glatten, DE
• Hartmut Kueppers · Reutlingen, DE
• Nicole Schittenhelm · Reutlingen, DE
• Volker Schmitz · Pfullingen, DE

Key dates

• Filing date: Aug 9, 2017
• Grant date: Aug 28, 2018
• Expiry date: Aug 9, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.