Precursors for the production of thin oxide layers and the use thereof

US10060033B2 · kind B2 · utility

Assignee

• Merck Patent GmbH · DE

Inventors

• Klaus Bonrad · Zwingenberg, DE
• Joerg J. Schneider · Seeheim-Jugenheim, DE
• Rudolf Hoffman · Darmstadt, DE
• Mareiki Kaloumenos · Darmstadt, DE

Key dates

• Filing date: Aug 4, 2014
• Grant date: Aug 28, 2018
• Expiry date: Aug 4, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D99/00
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The present invention relates to novel precursors in the form of metal complexes with 2-substituted 1,3-diketones and to a process for the preparation thereof. The invention furthermore relates to the use thereof for the production of thin metal-oxide layers. The latter are constituents in a very wide variety of electronic components and devices having various functions.