Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part
US10060723B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 25, 2014 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Aug 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/35316
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.