Integrated spectral unit
US10060791B2 · kind B2 · utility
3Cited by
3References
36Claims
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Assignee
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Key dates
| Filing date | Jun 15, 2017 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Jun 15, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/4532
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.