Pressure sensor
US10060815B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2014 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Apr 7, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed. The pressure sensor is a pressure sensor obtained by arranging, on a diaphragm having a long side and a short side, a sensor chip in which four strain gauges having the same characteristic and constituting a bridge circuit are provided, the pressure sensor being for detecting, in the bridge circuit, voltage output that is in proportion to a pressure applied to the diaphragm, and the pressure sensor is configured as follows: the four strain gauges are arranged to be adjacent to one another in the vicinity of the center of the diaphragm so that two strain gauges are arranged along the short side and the other two strain gauges are arranged along the long side; and the diaphragm has a thin portion in a long-side direction seen from the sensor chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.