Apparatus and method for measuring a wavelength-dependent optical characteristic of an optical system

US10060825B2 · kind B2 · utility

Assignee

• Trioptics GmbH · DE

Inventors

• Aiko Ruprecht · Wedel, DE
• Patrik Erichsen · Hetlingen, DE
• Daniel Winters · Traun, AT

Key dates

• Filing date: Sep 2, 2016
• Grant date: Aug 28, 2018
• Expiry date: Sep 7, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M11/0285
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for measuring a wavelength-dependent optical characteristic of an optical system has a light-pattern generation device which generates a pattern of polychromatic light in an object plane. Together with the optical system, a measuring optical unit images the object plane on a spatially resolving light sensor. A dispersive optical element is arranged in a light path between the optical system and the light sensor in such a way that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor. The evaluation device determines the wavelength-dependent characteristic of the optical system from the plurality of images on the light sensor.