MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph
US10060888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2015 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Dec 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2030/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.