Patent · US Active

Mask read-only memory device

US10062702B2 · kind B2 · utility

2Cited by
4References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 11, 2018
Grant dateAug 28, 2018
Priority date
Expiry dateJan 11, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B20/00

Abstract

A mask read-only memory (M-ROM) device is provided. In an M-ROM device, a first layer having a first type doping is formed in a substrate. A plurality of buried lines is formed in the first layer of the substrate. The plurality of buried lines are arranged in parallel in a first direction and isolated from each other. An epitaxial growth process is used to form a second layer on the first layer of the substrate. A plurality of diodes is formed in the second layer. The plurality of diodes is arranged in an array. Each diode includes a first electrode having a second type doping and connecting with one of the plurality of buried lines, and a second electrode having a first type doping and located on the first electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.