Cantilevered shear resonance microphone
US10063978B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Sep 13, 2016 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Sep 13, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS microphone includes a base structure and a piezoelectric resonator body having a first end and a second end. The first end is fixedly supported by the base structure and the second end is free such that the piezoelectric resonator is cantilevered from the base structure. The MEMS microphone further includes a first electrode operably connected to the piezoelectric resonator body and a second electrode operably connected to the piezoelectric resonator body. A controller includes at least one circuit operably connected to the first and second electrodes and configured to drive the piezoelectric resonator body at a shear resonance frequency of the piezoelectric resonator body and to detect a difference in the shear resonance frequency from a baseline resonance frequency resulting from a sound pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.