Source container and vapour-deposition reactor
US10066295B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2013 |
| Grant date | Sep 4, 2018 |
| Priority date | — |
| Expiry date | Jul 24, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45502
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a source container and to a vapor-deposition reactor. The source container according to one embodiment of the present invention comprises: a container comprising an inner wall for delimiting a first space for holing a source material, and a second space which is adjacent to the first space and is for the mixing of vapor emitted from the source material and a carrier gas taken into the inside thereof; a carrier gas inflow pathway which connects the outside of the container second space; a mixed gas discharge pathway which connects the outside of the container and the second space; and a flow-limiting member which expands inside the second space, and provides a first flow barrier surface between the inflow port and the discharge port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.