Patent · US Active

Three-axis micro gyroscope with ring spring

US10066941B2 · kind B2 · utility

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0References
12Claims
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Assignee

Inventor

Key dates

Filing dateMay 27, 2014
Grant dateSep 4, 2018
Priority date
Expiry dateSep 28, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/5747
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Disclosed is a three-axis micro gyroscope having a ring spring. The three-axis micro gyroscope of the present invention comprises: a main spring part; a driving part; an x mass part; an y mass part; a z mass part; and a sensing part. The x mass part moves in the y axis direction depending on the contraction and expansion of the main spring part. The y mass part moves in the x axis direction depending on the contraction and expansion of the main spring part. The z mass part comprises an x vibration mass means and an y vibration mass means. The sensing part senses vibration shaking of the x mass part, the y mass part and the z mass part. The three-axis micro gyroscope of the present invention is capable of effective measurement of rotational movements for all three of the x, y and z axes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.