Differential pressure sensor

US10067024B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Bernhard Jochem · Darmstadt, DE
• Timo Kober · Potsdam, DE
• Benjamin Lemke · Berlin, DE
• Darina Riemer Woyczehowski · Taunusstein, DE
• Rafael Teipen · Berlin, DE
• Anh Tuan Tham · Berlin, DE
• Roland Werthschutzky · Kleinmachnow, DE

Key dates

• Filing date: Nov 3, 2014
• Grant date: Sep 4, 2018
• Expiry date: Feb 22, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L13/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel. The mating body electrode is formed by an inner region of the metallic coating, which inner region is annularly enclosed by an outer region of the coating and is separated from the latter by an annular insulation region.