Making semiconductor devices with alignment bonding and substrate removal
US10068888B2 · kind B2 · utility
8Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2016 |
| Grant date | Sep 4, 2018 |
| Priority date | — |
| Expiry date | Oct 19, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/857
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments include a manufacturing method of making a semiconductor device via multiple stages of alignment bonding and substrate removal. One example is an integrated full-color LED display panel, in which multiple wafers with different arrays of LEDs are integrated onto a host wafer with driver circuitry. The driver circuitry typically is an array of pixel drivers that drive individual LEDs on the display panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.