Array substrate of OLED display device and manufacturing method thereof
US10068955B2 · kind B2 · utility
1Cited by
2References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 13, 2017 |
| Grant date | Sep 4, 2018 |
| Priority date | — |
| Expiry date | Mar 14, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/1201
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A manufacturing method of an array substrate of an OLED display device is provided. Active areas of a first thin film transistor T1 and a second thin film transistor T2 are formed by a first mask; channel doping areas, source electrode doping areas and drain electrode doping areas of T1 and T2 are formed by a second mask; gate electrodes of T1 and T2 are formed by a third mask; vias are formed by a fourth mask; source electrodes and drain electrodes of T1 and T2, a data line and a pixel electrode are formed by a fifth mask. The manufacturing method can simplify the process steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.