Load lock solar cell transfer system
US10069030B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 30, 2015 |
| Grant date | Sep 4, 2018 |
| Priority date | — |
| Expiry date | Dec 30, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Systems and methods for transferring solar cells while maintaining a controlled micro-environment are provided. In particular, such systems provide automated loading and unloading of solar cells by use of a conveyor and elevator within a tank receptacle sealingly connected with a solar cell carrying pods and a flow tube of solar cell components in a solar cell fabrication process. The tank receptacle can include one or more ports for sealingly and operably coupling with a cover of a solar cell carrying pod, each port having an elevator for withdrawing a removable base of the pod along with a solar cell carrying cassette into the tank and a conveyor to facilitate loading and/or unloading of solar cells with the cassette by coordinated movement of the elevator and conveyor. Such systems can further include a robotic arm having a gripper and nozzle to maintain a micro-environment within the pod during transport.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.