Detecting a substrate
US10072927B2 · kind B2 · utility
0Cited by
21References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2016 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Apr 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/0493
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure is directed to a system and method for detecting a surface of a substrate within a scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.