Scanning probe microscope and its sample holder
US10073116B2 · kind B2 · utility
0Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2014 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Dec 24, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This sample holder for a scanning probe microscope is constituted of (1) a container that retains a liquid and (2) a flat-plate-shaped upper cover that covers an upper opening of the container and that has a narrow slit above the position where a sample is placed. In the upper cover, the slit has a slit width with which a thin film of the liquid is formed over the upper surface of the sample when the liquid fills the space between the container and the upper cover. The thin film of the liquid has a film thickness smaller than the distance between the upper surface of the sample and the upper cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.