Process for manufacturing vertical optical coupling structures
US10073228B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 6, 2015 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Feb 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/26
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a method for manufacturing vertical optical coupling structures (1) between first optical or optoelectronic components (2) and second optical or optoelectronic components (3). Said vertical optical coupling structures are made by: (1) depositing a main layer (A) onto a substrate (25) including second optical or optoelectronic components; and (ii) lithography and/or physico-chemical etching of the main layer. Each vertical optical coupling structure is made such as to be located facing and making contact with a second optical component located in the substrate. The unitary main layer comprises generally frusto-conical coupling portions (12) consisting of a material having a refractive index greater than the refractive index of air. The coupling portions each have: a first transverse end surface (121) for making contact with the sending or receiving surface (21) of a first optical or optoelectronic component; and a second transverse end surface (122) that is in contact with the sending or receiving surface (31) of the second optical or optoelectronic component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.