Power distributor for defined sequential power distribution
US10074976B2 · kind B2 · utility
0Cited by
1References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2013 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Jun 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3467
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A power distributor that is capable of distributing the high power from a DC generator to more than two targets sequentially and without the power output of the DC generator being interrupted. Furthermore, the invention relates to a sputter source that includes the power generator described above.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.