Acoustic resonator and method of manufacturing the same
US10075147B2 · kind B2 · utility
3Cited by
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15Claims
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Key dates
| Filing date | Mar 9, 2015 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Sep 27, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator is provided in which loss of acoustic waves in a transverse direction may be reduced through a cavity formed in an acoustic resonance unit including a first electrode, a piezoelectric layer, and a second electrode, and in which acoustic waves in a longitudinal direction may be reduced by forming an air gap between the acoustic resonance unit and a substrate. Whereby, a quality factor may be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.