Circuit for detection of failure of a movable MEMS mirror
US10078032B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 21, 2016 |
| Grant date | Sep 18, 2018 |
| Priority date | — |
| Expiry date | Jun 21, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes an integrator receiving an opening angle signal representing an opening angle of the movable MEMS mirror, and a differentiator receiving the opening angle signal. A summing circuit is configured to sum the integrator output and the differentiator output. A comparison circuit is configured to determine whether the sum of the integrator output and differentiator output is not within a threshold window. An indicator circuit is configured to generate an indicator signal indicating that the movable MEMS mirror has failed based on the comparison circuit indicating that the sum of the integrator output and differentiator output is not within the threshold window.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.