Patent · US Active

Optical component

US10078271B2 · kind B2 · utility

0Cited by

5References

16Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Severin Waldis · Aalen, DE
Matthias Orth · Langenau, DE
Roger Marc Bostock · Münsingen, CH
Jian Deng · Brooklyn, US
Sebastian Lani · Murten, CH
Benedikt Knauf · Aalen, DE
Christian Kempter · Wittislingen, DE

Key dates

Filing date	Jul 17, 2014
Grant date	Sep 18, 2018
Priority date	—
Expiry date	Apr 1, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70291
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.