Systems for treating workpieces
US10081037B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 24, 2015 |
| Grant date | Sep 25, 2018 |
| Priority date | — |
| Expiry date | Mar 21, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B3/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Systems for treating workpieces are disclosed. A disclosed apparatus for treating workpieces with process fluid in a flooding chamber includes a container to provide process fluid, a process fluid delivery line that fluidly couples the container to the flooding chamber to provide process fluid to the flooding chamber, where the process fluid delivery line includes a container-side inflow region, and means for generating a process fluid jet that is to flow to the flooding chamber and pass through the container-side inflow region of the process fluid delivery line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.