Directional pulse injection into a microelectronic system for electrostatic test

US10082534B2 · kind B2 · utility

Assignee

• Intel IP Corporation · US

Inventors

• Harald Gossner · Riemerling, DE
• Krzysztof Domanski · Munich, DE
• David Johnsson · Munich, DE
• Benjamin Orr · Munich, DE

Key dates

• Filing date: Jun 17, 2015
• Grant date: Sep 25, 2018
• Expiry date: Jun 17, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2879
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A directional pulse injection system and method are described for injecting a pulse into a microelectronic system for electrostatic test. One example has a transformer coupled to a pulse source through a transmission line and to a conductive trace of a test board to apply the electrical pulse to the trace as a test pulse. The test board is connected to a microelectronic device under test. This example also has a cancellation pulse transmission line coupled to the pulse source and a cancellation pulse contact coupled to the pulse source through the cancellation pulse transmission line and to the trace on a side of the trace opposite the transformer to receive a cancellation signal from the pulse source and to couple the cancellation signal to the trace to cancel a portion of the test pulse.