Auto catch apparatus and method of use in making chemical mechanical polishing pads
US10086543B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 9, 2016 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Dec 24, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2031/736
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides an apparatus for use in mixing and dispensing a curable fluid stream (stream) into an open mold to fill the mold to make polishing pads for chemical mechanical planarization of substrates. The apparatus comprises an actuator frame on which is mounted (i) a set of two plates releasably attached to the actuator frame and adapted to cut the stream when the mold is full and to release from the actuator frame after cutting the stream, and (ii) a dispenser unit for continuous pouring of the stream into an open mold, the apparatus adapted to enable removal of the released plates from the actuator during the continuous pouring after the mold is full, e.g. by raising the actuator frame and the (ii) dispenser unit, whereby one can place a container above the mold to catch the plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.