Pellicle including a water-soluble adhesive and photomask assembly including the pellicle
US10087348B2 · kind B2 · utility
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6References
18Claims
0Family size
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Key dates
| Filing date | Sep 1, 2016 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Sep 1, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09J133/02
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.