Composite carrier and automated thickness measurement and calibration system and method
US10088304B2 · kind B2 · utility
0Cited by
3References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 4, 2016 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Jul 5, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/37398
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thickness measurement system includes a composite carrier assembly and a thickness sensor system. The composite carrier assembly includes a sample carrier and a gauge standard carrier. The sample carrier and gauge standard carrier are configured to simultaneously support a sample and a gauge standard, respectively. The thickness sensor system is configured to generate a signal representative of a thickness of the sample and to be calibrated with the gauge standard while the sample and the gauge standard are simultaneously supported by the sample carrier and the gauge standard carrier, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.