Friction coefficient measuring method of surface of specimen
US10088408B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 18, 2015 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Nov 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of measuring a friction coefficient of a surface of a specimen includes: obtaining surface information of the specimen by using an atomic force microscope (AFM); calculating data of a friction coefficient of the surface of the specimen by using the surface information of the specimen; and mapping the data of the friction coefficient of the specimen to an image. The method of measuring a friction coefficient of a surface of a specimen may prevent a probe part of an atomic force microscope from being worn out and secure high reliability of the friction coefficient value by correcting the atomic force microscope using a specimen to be actually measured and measuring a fiction coefficient at the same time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.