Imprinting method, computer program product and apparatus for the same
US10088747B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2015 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Jun 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a method and apparatus for contacting a relief stamping surface of a flexible stamp with a receiving surface of a substrate. The method and apparatus can be used in an imprinting method. During the method and with the apparatus, creation or breaking of contact near a contact front (border) of a preformed contact area in which a part of a locally bent relief stamping surface is in contact with the stamp receiving surface, the speed of such creation or breaking is varied for different parts of the flexible stamp such that this contact front moves over the stamp receiving surface with different speed at different locations along a contact front movement trajectory on the stamp receiving surface. This may be used to optimize throughput when using such method and apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.