Patent · US Active

Fabrication of free standing membranes and use thereof for synthesis of nanoparticle patterns

US10088751B2 · kind B2 · utility

5Cited by
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6Claims
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Key dates

Filing dateNov 27, 2017
Grant dateOct 2, 2018
Priority date
Expiry dateNov 27, 2037

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24496
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

The present disclosure discloses a method of fabrication of free standing open pore membranes with uniform pore size and shape and ordered pore distribution, and its use for synthesis of nanoparticle patterns. The method includes applying a photoresist layer to the top surface of a substrate, heating the photoresist layer for a period of time, and exposing the photoresist layer to a dose of ultraviolet radiation through a mask having a predetermined pattern. The dose of ultraviolet radiation is controlled in intensity and time and the photoresist layer is exposed such that a top portion of the photoresist layer through which the dose of ultraviolet radiation enters the photoresist layer undergoes greater cross linking than a bottom portion of the photoresist layer immediately adjacent to the top surface of the substrate such that a cross linking gradient develops through a thickness of the photoresist layer. The mask is removed and the membrane is readily detached from the top surface of the substrate since the portion of the membrane adjacent to the top surface is less cross linked than the top surface of the membrane. The detached membrane forms a free standing patterned membrane…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.