Device with electrode connected to through wire, and method for manufacturing the same
US10090780B2 · kind B2 · utility
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23Claims
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Key dates
| Filing date | Aug 4, 2015 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Dec 14, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A capacitive transducer includes a substrate having a first surface and a second surface opposite the first surface, the substrate including a through wire extending therethrough between the first surface and the second surface, and a cell on the first surface, the cell including a first electrode and a second electrode spaced apart from the first electrode with a gap between the first electrode and the second electrode. Conductive protective films are disposed over surfaces of the through wire on the first surface side and the second surface side of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.