Molecular layer deposition process for making organic or organic-inorganic polymers

US10092927B2 · kind B2 · utility

Assignee

• The Regents of the University of Colorado, a Body Corporate · US

Inventors

• Steven M. George · Boulder, US
• Arrelaine Dameron · Boulder, US
• Nicole Marie Adamczyk Keaner · Madison, US
• Byunghoon Yoon · Sunnyvale, US

Key dates

• Filing date: Nov 13, 2007
• Grant date: Oct 9, 2018
• Expiry date: Jul 22, 2032

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B05D7/52
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Ultrathin layers of organic polymers or organic-inorganic hybrid polymers are deposited onto a substrate using molecular layer deposition methods. The process uses vapor phase materials which contain a first functional group and react only monofunctionally at the surface to add a unit to the polymer chain. The vapor phase reactant in addition has a second functional group, which is different from the first functional group, or a blocked, masked or protected functional group, or else has a precursor to such a functional group.